| タイトル |
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半導体レーザの自己結合効果を用いた微小変位センサの研究
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| その他のタイトル |
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ハンドウタイ レーザ ノ ジコ ケツゴウ コウカ ヲ モチイタ ビショウ ヘンイ センサ ノ ケンキュウ
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Study on micro displacement sensor using self-coupling effect of semiconductor laser
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| 作成者 |
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| 内容注記 |
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Other
Recently, using self-coupling effect of semiconductor laser, a compact distance or vibration meter has been studied. In this work, a new type of micro displacement sensor using self-coupling effect of semiconductor laser is studied. The displacement more than 1/2 wavelength can be measured from the peak number of interference output by self-coupling effect. To measure the displacement below 1/2 wavelength, this sensor is made from a movable structure. Adding micro vibration of 6KHz to the sensor and ajusting DC bias voltage applied to the sensor, a displacement of the sensor is controlled so that the vibration output becomes a maximum value. When the target displaces, it is again controlled to get a maximum vibration output. The micro displacement of the target is measured from the sensor displacement. It is found that the micro displacement can be measured with resolution power of several 10 nm.
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Other
identifier:http://repository.aitech.ac.jp/dspace/handle/11133/1502
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| 出版者 |
愛知工業大学
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| 日付 |
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| 言語 |
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| 資源タイプ |
research report |
| 出版タイプ |
NA |
| 資源識別子 |
URI
http://hdl.handle.net/11133/1502
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| 収録誌情報 |
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NCID
AA12337561
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ISSN
1883-3217
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愛知工業大学研究報告 = Bulletin of Aichi Institute of Technology
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巻46
開始ページ143
終了ページ148
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| ファイル |
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| コンテンツ更新日時 |
2021-04-15 |
