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Analysis of electron heating due to partial resonance in an inductively coupled plasma under confronting divergent magnetic fields
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| アクセス権 |
open access |
| 権利情報 |
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This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics(JJAP). IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at 10.35848/1347-4065/acc4cc.
- https://creativecommons.org/licenses/by-nc-nd/4.0/
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Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
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| 内容注記 |
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This article is corrected by 2023 Jpn. J. Appl. Phys. 62 SL9401 [10.35848/1347-4065/ace1db]
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Abstract
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We investigate the partial resonance as one of the mechanisms of the electron heating to sustain inductively coupled plasmas driven under confronting divergent magnetic fields having an electron confinement function. The dependence of the partial resonance on operating conditions is observed. The electron energy gain (EEG), defined as a measure for evaluation of the partial resonance, was calculated by a Monte Carlo method under various magnetic field strengths and RF antenna positions. It is confirmed that the partial resonance is observed in the resonant region even in low electric field and a strong magnetic field. As an attempt to utilize the partial resonance, we demonstrate enhancement of the EEG and resulting ionization in the resonant region by placing the RF antenna near a region where the magnetic field lines running through the resonant region reach.
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| 日付 |
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| 言語 |
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| 資源タイプ |
journal article |
| 出版タイプ |
AM |
| 資源識別子 |
HDL
http://hdl.handle.net/2115/94037
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| 関連 |
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isVersionOf
DOI
https://doi.org/10.35848/1347-4065/acc4cc
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| 収録誌情報 |
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PISSN
0021-4922
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EISSN
1347-4065
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Japanese Journal of Applied Physics
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巻62
号SL
開始ページSL1003
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| コンテンツ更新日時 |
2025-02-22 |
