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Title
  • en Analysis of electron heating due to partial resonance in an inductively coupled plasma under confronting divergent magnetic fields
Creator
Accessrights open access
Rights
  • en This is the Accepted Manuscript version of an article accepted for publication in Japanese Journal of Applied Physics(JJAP). IOP Publishing Ltd is not responsible for any errors or omissions in this version of the manuscript or any version derived from it. The Version of Record is available online at 10.35848/1347-4065/acc4cc.
  • https://creativecommons.org/licenses/by-nc-nd/4.0/
  • en Creative Commons Attribution-NonCommercial-NoDerivatives 4.0 International
Subject
  • NDC 501
Description
  • Other en This article is corrected by 2023 Jpn. J. Appl. Phys. 62 SL9401 [10.35848/1347-4065/ace1db]
  • Abstract en We investigate the partial resonance as one of the mechanisms of the electron heating to sustain inductively coupled plasmas driven under confronting divergent magnetic fields having an electron confinement function. The dependence of the partial resonance on operating conditions is observed. The electron energy gain (EEG), defined as a measure for evaluation of the partial resonance, was calculated by a Monte Carlo method under various magnetic field strengths and RF antenna positions. It is confirmed that the partial resonance is observed in the resonant region even in low electric field and a strong magnetic field. As an attempt to utilize the partial resonance, we demonstrate enhancement of the EEG and resulting ionization in the resonant region by placing the RF antenna near a region where the magnetic field lines running through the resonant region reach.
Date
    Issued2023-04-12
Language
  • eng
Resource Type journal article
Version Type AM
Identifier HDL http://hdl.handle.net/2115/94037
Relation
  • isVersionOf DOI https://doi.org/10.35848/1347-4065/acc4cc
Journal
    • PISSN 0021-4922
    • EISSN 1347-4065
      • en Japanese Journal of Applied Physics
      • Volume Number62 Issue NumberSL Page StartSL1003
File
Oaidate 2025-02-22