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Displaying 1 - 20 of 33

An improved calculation scheme of electron flow in a propagator method for solving the Boltzmann equation

Kobayashi, Tsukasa | Sugawara, Hirotake | Ikeda, Kei

Journal TitleJapanese Journal of Applied Physics
Volume Number 62 Issue Number SL Page Start SL1020

Date 2023-06-29

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Analysis of electron heating due to partial resonance in an inductively coupled plasma under confronting divergent magnetic fields

Okazaki, Ryota | Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics
Volume Number 62 Issue Number SL Page Start SL1003

Date 2023-04-12

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Elliptic vector loci of average electron velocity of electron swarm in constant-collision-frequency model gas under ac electric and dc magnetic fields crossed at arbitrary angles

Sugawara, Hirotake | Nakata, Yuya

Journal TitleEuropean physical journal D, Atoms, molecules and clusters
Volume Number 76 Issue Number 2 Page Start 32

Date 2022-02-15

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

A technology demonstration of propagator matrix power method for calculation of electron velocity distribution functions in gas in long-term transient and succeeding equilibrium states under dc electric fields

Sugawara, Hirotake | Iwamoto, Hikaru

Journal TitleJapanese Journal of Applied Physics (JJAP)
Volume Number 60 Issue Number 4 Page Start 046001

Date 2021-03-09

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Stochastic electron energy gain under sheath electric field near sidewall of chamber to drive inductively coupled magnetized plasmas

Takahashi, Hironori | Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics (JJAP)
Volume Number 59 Issue Number 3 Page Start 036001

Date 2020-03-01

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Phase-resolved profiles of electron energy deposition in inductively coupled radio-frequency plasmas driven under confronting divergent magnetic fields

Nakashima, Katsuhiro | Takahashi, Hironori | Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics
Volume Number 58 Issue Number 11 Page Start 116001-1 Page End 116001-7

Date 2019-10-16

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Derivation of the electron drift velocity vector in gas under crossed ac electric and dc magnetic fields assuming constant-collision-frequency models

Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics
Volume Number 58 Issue Number 10 Page Start 108002-1 Page End 108002-4

Date 2019-09-12

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Configuration of propagator method for calculation of electron velocity distribution function in gas under crossed electric and magnetic fields

SUGAWARA, Hirotake

Journal TitlePlasma Science and Technology
Volume Number 21 Issue Number 9 Page Start 094001-1 Page End 094001-18

Date 2019-06-21

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Stochastic electron energy gain in inductively coupled magnetized plasmas accompanying electron reflection at chamber wall

Takahashi, Hironori | Nakashima, Katsuhiro | Yamamoto, Tappei | Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics
Volume Number 57 Issue Number 12 Page Start 126101

Date 2018-10-26

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

A Computational Scheme of Propagator Method for Moment Equations to Derive Real-Space Electron Transport Coefficients in Gas Under Crossed Electric and Magnetic Fields

Sugawara, Hirotake

Journal TitleIEEE Transactions on Plasma Science
Volume Number 47 Issue Number 2 Page Start 1071 Page End 1082

Date 2018-09-06

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Efficiency and limitation of periodic sample multiplication to reduce computational load in Monte Carlo simulations of electron swarms in gas under attachment-dominated conditions

Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics (JJAP)
Volume Number 57 Issue Number 3 Page Start 038001

Date 2018-03

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

A relaxation-accelerated propagator method for calculations of electron energy distribution function and electron transport parameters in gas under dc electric fields

Sugawara, Hirotake

Journal TitlePlasma Sources Science and Technology
Volume Number 26 Issue Number 4 Page Start 044002

Date 2017-04-01

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Fundamental study on filter effect of confronting divergent magnetic fields applied to low-pressure inductively coupled plasmas

Sugawara, Hirotake | Ogino, So

Journal TitleJapanese Journal of Applied Physics
Volume Number 55 Issue Number 7 Page Start 07

Date 2016-06-13

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Structure and Energy Deposition Process of an Inductively Coupled Plasma Under Confronting Divergent Magnetic Fields

Minami, Yudai | Asami, Yusuke | Sugawara, Hirotake

Journal TitleIEEE Transactions on Plasma Science
Volume Number 42 Issue Number 10 Page Start 2550 Page End 2551

Date 2014-10-21

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Effect of Substrate Bias on Production and Transport of Etchant Ions in a Magnetic Neutral Loop Discharge Plasma

Asami, Yusuke | Sugawara, Hirotake

Journal TitleIEEE Transactions on Plasma Science
Volume Number 42 Issue Number 10 Page Start 2540 Page End 2541

Date 2014-10-21

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Scattering-Based Stochastic Process Attracting Electrons Inward under Antiparallel Gradient Magnetic Fields

Sugawara, Hirotake

Journal TitleJournal of the Physical Society of Japan
Volume Number 82 Issue Number 6 Page Start 064501

Date 2013-06

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Characteristics of Electron Conduction in a Gas under a Quadrupole Magnetic Field and Radio-Frequency Electric Fields

Sugawara, Hirotake

Journal TitleJapanese Journal of Applied Physics
Volume Number 52 Page Start 056101

Date 2013-05

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Structure and dynamics of a magnetic neutral loop discharge plasma described using electron motion in a quadrupole magnetic field

Osaga, Tsuyoshi | Sugawara, Hirotake | Sakurai, Yohei

Journal TitlePlasma Sources Science and Technology
Volume Number 20 Issue Number 6 Page Start 065003

Date 2011-12

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Electron Distribution in a Quadrupole Magnetic Field to Drive Magnetic Neutral Loop Discharge Plasma

Osaga, Tsuyoshi | Sakurai, Yohei | Sugawara, Hirotake

Journal TitleIEEE Transactions on Plasma Science
Volume Number 39 Issue Number 11 Page Start 2546 Page End 2547

Date 2011-11

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University

Control of Magnetic Field in Neutral Loop Discharge Plasma for Uniform Distribution of Ion Flux on Substrate

Sakurai, Yohei | Osaga, Tsuyoshi | Sugawara, Hirotake

Journal TitleIEEE Transactions on Plasma Science
Volume Number 39 Issue Number 11 Page Start 2550 Page End 2551

Date 2011-11

Hokkaido University Collection of Scholarly and Academic PapersHokkaido University